Date published: 2026-4-3

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Hexamethyldisilazane (CAS 999-97-3)

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Alternate Names:
HMDS; Bis(trimethylsilyl)amine; 1,1,1,3,3,3-Hexamethyldisilazane
Application:
Hexamethyldisilazane is an organosilicon derivative of ammonia
CAS Number:
999-97-3
Purity:
≥96%
Molecular Weight:
161.39
Molecular Formula:
C6H19NSi2
Supplemental Information:
This is classified as a Dangerous Good for transport and may be subject to additional shipping charges.
For Research Use Only. Not Intended for Diagnostic or Therapeutic Use.
* Refer to Certificate of Analysis for lot specific data.

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Hexamethyldisilazane is a derivative of ammonia with trimethylsilyl groups in place of two hydrogen atoms. The compound is primarily used as a precursor to many bases common in organic synthesis and organometallic chemistry. Hexamethyldisilazane also has applications in photolithography, electron microscopy and pyrolysis-gas chromatography-mass spectrometry.


Hexamethyldisilazane (CAS 999-97-3) References

  1. Hydrophobic passivation of ultra-high-Q silica wedge resonators using hexamethyldisilazane.  |  Jeong, D., et al. 2021. Opt Lett. 46: 2019-2022. PMID: 33929408
  2. Low-energy Ar+ and N+ ion beam induced chemical vapor deposition using hexamethyldisilazane for the formation of nitrogen containing SiC and carbon containing SiN films.  |  Yoshimura, S., et al. 2021. PLoS One. 16: e0259216. PMID: 34705881
  3. A Silicon-Stereogenic Silanol - 18 O-Isotope Labeling and Stereogenic Probe Reveals Hidden Stereospecific Water Exchange Reaction.  |  Langenohl, F., et al. 2023. Chemistry. 29: e202202935. PMID: 36166278
  4. Neutron Reflectivity Study on the Suppression of Interfacial Water Accumulation between a Polypropylene Thin Film and Si Substrate Using a Silane-Coupling Agent.  |  Shimokita, K., et al. 2022. Langmuir. 38: 12457-12465. PMID: 36194884
  5. Acid-controlled multicomponent selective synthesis of 2,4,6-triaryl pyridines and pyrimidines by using hexamethyldisilazane as a nitrogen source under microwave irradiation.  |  Chan, CK., et al. 2022. RSC Adv. 12: 27281-27291. PMID: 36276015
  6. Hydrophobic Cellulose Acetate Aerogels for Thermal Insulation.  |  Zhang, S., et al. 2022. Gels. 8: PMID: 36286172
  7. Hexamethyldisilazane-Mediated Amidination of Sulfonamides and Amines with Formamides.  |  Chou, YC., et al. 2022. J Org Chem. 87: 15327-15332. PMID: 36302512
  8. Structure-Dependent Electrical Conductance of DNA Origami Nanowires.  |  Marrs, J., et al. 2023. Chembiochem. 24: e202200454. PMID: 36342926
  9. Tween-80 improves single/coaxial electrospinning of three-layered bioartificial blood vessel.  |  Wu, C., et al. 2022. J Mater Sci Mater Med. 34: 6. PMID: 36586045
  10. Investigation of grafting silane coupling agents on superhydrophobicity of carbonyl iron/SiO2 particles for efficient oil/water mixture and emulsion separation.  |  Rabbani, Y., et al. 2023. Sci Rep. 13: 788. PMID: 36646864
  11. Polyborosilazanes with Controllable B/N Ratio for Si-B-C-N Ceramics.  |  Dang, Y., et al. 2023. Materials (Basel). 16: PMID: 36770061
  12. Origin of the Springback Effect in Ambient-Pressure-Dried Silica Aerogels: The Effect of Surface Silylation.  |  Zemke, F., et al. 2023. Gels. 9: PMID: 36826330
  13. Corn stalk pith-based hydrophobic aerogel for efficient oil sorption.  |  Peng, D., et al. 2023. J Hazard Mater. 448: 130954. PMID: 36860041
  14. Plasma Enhanced High-Rate Deposition of Advanced Film Materials by Metal Reactive Evaporation in Organosilicon Vapors.  |  Menshakov, A., et al. 2023. Membranes (Basel). 13: PMID: 37103801

Ordering Information

Product NameCatalog #UNITPriceQtyFAVORITES

Hexamethyldisilazane, 25 ml

sc-295151A
25 ml
$33.00

Hexamethyldisilazane, 100 ml

sc-295151
100 ml
$67.00

Hexamethyldisilazane, 500 ml

sc-295151B
500 ml
$149.00