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Pentakis(dimethylamino)tantalum(V) is a volatile solid CVD precursor to tantalum nitride thin films. It also yields tantalum oxide thin films when O2, H2O, NO or H2O2 is present during the deposition process.
Ordering Information
| Product Name | Catalog # | UNIT | Price | Qty | FAVORITES | |
Pentakis(dimethylamino)tantalum(V), 5 g | sc-236320 | 5 g | $415.00 |