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Pentakis(dimethylamino)tantalum(V) (CAS 19824-59-0)

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Application:
Pentakis(dimethylamino)tantalum(V) is a volatile solid CVD precursor to tantalum nitride thin films
CAS Number:
19824-59-0
Molecular Weight:
401.33
Molecular Formula:
C10H30N5Ta
For Research Use Only. Not Intended for Diagnostic or Therapeutic Use.
* Refer to Certificate of Analysis for lot specific data.

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Pentakis(dimethylamino)tantalum(V) is a volatile solid CVD precursor to tantalum nitride thin films. It also yields tantalum oxide thin films when O2, H2O, NO or H2O2 is present during the deposition process.


Pentakis(dimethylamino)tantalum(V) (CAS 19824-59-0) References

1. Son, K. -A. et. al. J. Vac. Sci. Technol. A 16, 1670, (1998) 2. Son, K. -A. et. al. Appl. Phys. Lett. 72, 1187, (1998)

Ordering Information

Product NameCatalog #UNITPriceQtyFAVORITES

Pentakis(dimethylamino)tantalum(V), 5 g

sc-236320
5 g
$415.00